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图形化衬底WPSS

2014-09-02

2"WPSS

Inspection

Item

Detail

Spec

Description

SEM
Image
Inspection

Width

Average

5.40±0.40um





Unif.

5%

Height

Average

1.65±0.1um

Unif.

5%

OM Image
Inspection

C-plane

Average

0.55±0.25um

Unif.

5%

Scope Inspection

Pattern Link

Pattern Link

8ea

every pattern link should be counted

Pattern Missing

100um

8ea

pattern missing in a Circle area diameter:100umshould be judged as 1ea

Scratch

1.2mm

7ea

width60um and lenth1.2mm should be judged as 1ea
if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

Edge Bead

Edge Bead

1.8mm

The pattern failed within the 1.8mm area from the wafer edge should not be counted
The non-pattern area should be less than1mm from the wafer edge

Abnormal Shape

Abnormal Shape

3%

Total area of abormal shape pattern should be less than 3%