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2寸蓝宝石衬底

2014-09-01



蓝宝石晶片

Item

2"

Unit

 Dimension

Diameter:

50.8±0.25

mm

Thickness:

430±15

um

Primary Flat:

16±1

mm

Orientation

Surface-cut:

C plane : Tilt 0.2°±0.1° in M axis

~

Primary Flat:

A plane : 0°±0.25°

~

Flatness

Bow:

0 ~ (-6)

um

Warp:

10

um

Total Thickness Variation (TTV):

5

um

LTV

2

um

Front side Roughness

0.2

nm

Back side Roughness

0.8-1.2

um

Cleanliness

No particles and fingerprints

~

4.Material Quality

High-purity mono-crystal Al2O3

~

5.Package

Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

~

6.Trace Ability

Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

~

7.Laser Mark

Front or Back side

~